I: 1 fA to 100 mA (20 fA offset accuracy)

V: 1 micro V to 100 V

Fully automated I-V sweep measurements with DC or Pulse Mode expandable up to 6 SMUs

Synchronized stress/measure function

Two high-voltage pulse generator units (+/- 40 V)

Time domain measurement: 60 micro s - variable intervals up to 10,001 points

Easy to use knob-sweep similar to curve tracer

Automatic analysis functions

Built-in Agilent / HP Instrument BASIC

Trigger I/Q capability